Bio-Medical Applications by Micro-Nano Robotics
11/85 Nanofabrication Using Electron Beam inside a SEM


We suggested a series technique for nanofabrication of CNTs inside a SEM by introducing oxygen gas. Our system have a large space, can be easy operate, and can realize in situ fabrication and manipulation. The oxygen gas is introduced into the vicinity of the sample with a glass nozzle and is regulated by a digital mass flow controller. The gap between the CNTs and the gas nozzle can be adjusted using a nanorobotic manipulator.