On-chip Robotics for Biomedical Innovations
53/70 Force Sensing Structure


The any force sensors which require several wirings are difficult to implement to tip of microrobot. Therefore, as a first step of force sensing, we use a frame shaped beam structure to measure the applied force. In addition, to increase the sensitivity of force sensing, the magnification mechanism of the beam deformation is placed into the frame. The basic principle of the force sensing is as shown here. As a material of the microrobot, we selected Si which has a biocompatibility to prevent damage to the microorganism. From the frame displacement and the material information, we can measure the applied force. This figure shows the results of the FEM analysis based on the designed parameters. From this results, we confirmed that the force sensing structure with the width of 3 um has a large elastic deformation without any breakage.