This figure shows
the evaluation of the repetitive(リペティティブ) positioning accuracy
by the external magnetic field produced by a permanent magnet.
The repetitive accuracy was estimated by the pixels of the displacement of probe tip.
The result shows that the reduction rate was about 1/12.
The standard deviation of displacement was under 1 pixel (1 pixel = 0.63 mm)
and the linearity of between Manipulation distance of XY-stage and the displacement of probe tip quite high rate.
Consequently we concluded that the repetitive accuracy was nanometric order
and we have succeeded in nanometric order non-contact actuation of on-chip probe tip by using reduction mechanism.
In this experiment, we actuated the probe in this region to avoid the dead band area.
Dead band means the area where micro-tools don’t move despite the displacement of the motorized stage, when we actuated the micro-tools.