To obtain nanometric order resolution, we proposed the reduction mechanism.
This figure shows the basic idea of the reduction mechanism.
Previously, when we actuated the micro-tools
displacement of actuation point of tool is equal to displacement of manipulation point.
Dead band means the area where micro-tools don’t move despite the displacement of the motorized stage, when we actuated the micro-tools
At the proposed method,
displacement of actuation point is reduced by reduction mechanism,
and we can get high positioning resolution at the manipulation point.