On-chip Robotics for Biomedical Innovations
46/70 For Nanometric Positioning


To obtain nanometric order resolution, we proposed the reduction mechanism. This figure shows the basic idea of the reduction mechanism. Previously, when we actuated the micro-tools displacement of actuation point of tool is equal to displacement of manipulation point. Dead band means the area where micro-tools don’t move despite the displacement of the motorized stage, when we actuated the micro-tools At the proposed method, displacement of actuation point is reduced by reduction mechanism, and we can get high positioning resolution at the manipulation point.